Exploration | 微观世界的奇妙探索之旅（一）
暖暖春日里盎然的自然万物、炎炎夏日里翘首以盼的流星、浓浓秋意中如蝶摇曳的落叶、皑皑白雪下覆盖的岩石······一年四季斗转星移，理工科的浪漫“镜”在眼底。
在扫描电子显微镜下看到的TNM合金不同组织和形态
此外，在扫描电子显微镜下，我们还可以看到多种材料的微观形貌。
陶瓷材料的不同断口形貌
钙钛矿量子点（左）和锂镍锰钴氧化物（右）的微观形貌
果蝇纤毛（左）和医用口罩外层纤维（右）的微观形貌
以上妙趣横生的图片皆出自广东以色列理工学院电镜中心扫描电子显微镜（Scanning electron microscope-SEM）（型号：Zeiss GeminiSEM 450）。
下面，就让我们来详细了解一下这台神奇的扫描电子显微镜吧！
主要应用领域
高分辨率形貌观察
半导体材料失效分析
材料成分及晶体结构分析
主机配置
除Gemini2双聚光镜电子光学镜筒、80mm样品交换室及等离子清洗仪之外，该设备还配置了七个用于不同模式的探测器。
探测器 | 接收信号 |
Inlens SE探测器 | 镜筒内二次电子 |
SE2探测器 | 样品室二次电子 |
Inlens ESB探测器 | 镜筒内背散射电子 |
BSD探测器 | 样品室背散射电子 |
VPBSD探测器 | 低真空模式下的背散射电子 |
VPSE探测器 | 低真空模式下的二次电子 |
STEM探测器 | 透射模式下的透射电子 |
优势
无漏磁物镜设计，可以对弱磁性材料等极具挑战的样品进行高品质成像；
探测模式多样，在低真空模式下，几乎可对任意一种类型样品成像，如电子束敏感型样品、无导电涂层样品等样品；
加速电压在0.02～30kV范围内连续可调，探针束流在3pA-40nA范围内连续调，针对样品特性，可自由选择合适的电压和束流组合进行成像和分析；分辨率在15kV的加速电压下可达到0.7nm；
可在低束流的高分辨率成像与高束流的分析模式之间无缝切换，此外，可配备能谱仪和背散射电子衍射探测器，用于材料成分及晶体结构分析。
●广东以色列理工学院材料学院电镜中心●
广东以色列理工学院拥有世界一流的学术环境和科研团队。当前正在加紧建设的广以材料学院电镜中心(Electron Microscopy Center-EMC)是一个跨领域、跨学科，集分析测试服务、基础研究和应用研究为一体的综合性开放平台。电镜中心以材料的微观表征为切入点，用多种电子显微方法研究不同材料的微观结构和化学成分(可至原子水平)，并建立微观结构、化学成分和材料性能之间的内秉关系，为材料性能优化和进一步应用提供基本的科学支撑。
电镜中心的研究方向包括材料科学、凝聚态物理、能源、纳米学科与技术交叉等重要的学科领域，主要包含的高端仪器设备有透射电子显微镜（Transmission Electron Microscope-TEM）、双束聚焦离子束系统（Focused Ion Beam system-FIB）、扫描电子显微镜（Scanning Electron Microscope-SEM）。
建设进展当前，扫描电子显微镜（SEM）已入驻广东以色列理工学院电镜中心，目前处于调试阶段，即将开放使用，透射电子显微镜（TEM）和双束聚焦离子束系统（FIB）也将在今年内入驻广以电镜中心。
示范合作目前，广东以色列理工学院材料学院电镜中心已与德国卡尔蔡司（Zeiss）电子显微镜公司合作建立扫描电镜示范实验室；与美国赛默飞(Thermo Fisher)公司、美国阿美泰克(Ametek)公司建立了示范实验室合作计划，是粤东高校最高端的电镜分析平台。
中心团队广东以色列理工学院材料学院电镜中心团队由电镜中心主任茶丽梅（二排左），以及申静芳（前排左）、张文静（前排右）、司志祥（二排右）3位经验丰富的电镜工程师组成。
茶丽梅，电镜中心主任；博士毕业于德国马普学会金属所，师从著名透射电子显微学专家德国科学院院士Manfred Ruehle教授，在材料微观结构及电镜分析领域背景深厚，有坚实的理论知识基础和丰富的实践经验。在德国、奥地利、法国等欧洲顶级国家实验室电镜团队从事材料分析研究工作十余年，并与国内外顶尖团队交流合作。回国后曾独立主持并合作开展7项国家级和省部级自然科学基金。2018年中入职广以，开始策划搭建广以电镜中心。
三位电镜工程师分别在哈尔滨工业大学、浙江大学、山东大学、北京工业大学、太原理工大学、中国航发贵州黎阳航空动力有限公司等单位有学习工作经历，积累了扎实的电镜理论基础和丰富的实践经验，可熟练操作及维护多类型电子显微镜。
Under the scanning electron microscope, we can see the different structures and morphologies of different materials. Let’s use our imagination and experience the romance of science.
The picture shows the different phases and structures in TNM alloys observed by scanning electron microscope.
Different fracture morphologies of PZT ceramics
Perovskite quantum dots (left) and Lithium Nickel Manganese Cobalt Oxide (right)
The interesting pictures above are all from the scanning electron microscope (Zeiss GeminiSEM 450) at the Electron Microscopy Center of GTIIT.
Main application areas
• High-resolution topography observation
• Failure analysis of semiconductor materials
• Material composition and crystal structure analysis
Host configuration
In addition to Gemini2 Double Condenser Electron Optical Tube, 80 mm sample exchange room and plasma cleaning instrument, the device is equipped with seven detectors for different modes.
Advantages
No magnetic flux leakage objective lens design, which can perform high-quality imaging of challenging samples such as weak magnetic materials.
Various detection modes, in variable pressure mode, it can image almost any type of samples, such as electron beam sensitive samples, samples without conductive coating, etc.
The acceleration voltage is continuously adjustable in the range of 0.02～30kV, and the probe beam current is continuously adjusted in the range of 3pA-40nA. According to the characteristics of the sample, it can freely choose the appropriate voltage and beam combination for imaging and analysis. The resolution can reach 0.7nm at 15kV acceleration voltage.
Seamlessly switch between low-beam high-resolution imaging and high-beam analysis mode. In addition, it can be equipped with an energy spectrometer and a backscattered electron diffraction detector for material composition and crystal structure analysis.
Introduction of the Electron Microscopy Center (EMC) of GTIIT
GTIIT has world-class academic environment and research teams. The Electron Microscopy Center (EMC) of GTIIT, which is currently under construction, is an open platform that integrates analytical testing services, fundamental research and applied research. EMC takes the micro characterization of materials as the entry point, studies the microstructure and chemical composition of different materials (up to the atomic level) by a variety of electron microscopy methods, and establishes the internal relationship among the microstructure, chemical composition and material performance, providing basic scientific support for material performance optimization and further application.
Research fields of the EMC include materials science, condensed matter physics, energy, nanotechnology and the cross-discipline of technology. It mainly consists of high-end instruments: Transmission Electron Microscope (TEM), Focused Ion Beam system (FIB), Scanning Electron Microscope (SEM).
DevelopmentsCurrently, the SEM has been settled in the Electron Microscopy Center, now it is in the debugging stage and will be open for use soon. TEM and FIB will be installed in the center this year.
Demonstration CooperationsAt present, GTIIT Electron Microscopy Center has cooperated with Zeiss to establish a scanning electron microscope demonstration laboratory, and another demonstration laboratory cooperation programs have been established with Thermo Fisher and Ametek, respectively. GTIIT Electron Microscopy Center is the highest electron microscopy analysis platform among the universities in the Eastern Guangdong Province.
Team MembersThe team of the GTIIT Electron Microscopy Center is composed of Limei Cha (the second row left), Director of Electron Microscopy Center, and three experienced electron microscope engineers including Jingfang Shen (front row left), Wenjing Zhang (front row right), and Zhixiang Si (second row right).
Limei Cha is the Director of the Electron Microscopy Centre, who graduated from Max-Planck-Institute for Metal Research in Germany. Her tutor is Professor Manfred Ruehle, a famousexpert in transmission electron microscopy and academician of German Academy of Sciences. She has solid theoretical knowledge foundation and rich practical experience in the field of microstructure and electron microscopy analysis of materials. She engaged in materials analysis and research for more than ten years, working in the electron microscopy team of the best national laboratories in Europe such as Germany, Austria, France, etc., and communicating and cooperating with top teams at home and abroad. After returning to China, she was independently responsible or cooperating with others to complete 7 national or provincial natural science fund projects. She joined GTIIT in mid-2018 and started to planand build GTIIT Electron Microscopy Center.
The three electron microscope engineers have studied or worked in Harbin Institute of Technology, Zhejiang University, Shandong University, Beijing University of Technology, Taiyuan University of Technology, China Aviation Development Guizhou Liyang Aviation Power Co., Ltd.. They have solid theoretical basis and rich practical experience in electron microscopy, and can skillfully use and maintain multiple types of electron microscope.
文：GTIIT传媒与公共事务部
图：GTIIT电镜中心、GTIIT传媒与公共事务部
Text: GTIIT News & Public Affairs
Photos: GTIIT Electron Microscopy Center, GTIIT News & Public Affairs